Laser Produced X-Ray for High Resolution Lithography.
Annual rept. 15 Dec 83-14 Dec 84,
BATTELLE COLUMBUS LABS OH
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During the past year the research effort was concentrated on the rapidly pulsed laser-plasma x-ray source. The effort was divided into three areas developing the source and system, studying improved diagnostic, and making accurate x-ray measurements over a parameter matrix.
- Lasers and Masers
- Printing and Graphic Arts