Accession Number:

ADA158734

Title:

Laser Produced X-Ray for High Resolution Lithography.

Descriptive Note:

Annual rept. 15 Dec 83-14 Dec 84,

Corporate Author:

BATTELLE COLUMBUS LABS OH

Personal Author(s):

Report Date:

1985-04-17

Pagination or Media Count:

42.0

Abstract:

During the past year the research effort was concentrated on the rapidly pulsed laser-plasma x-ray source. The effort was divided into three areas developing the source and system, studying improved diagnostic, and making accurate x-ray measurements over a parameter matrix.

Subject Categories:

  • Lasers and Masers
  • Printing and Graphic Arts

Distribution Statement:

APPROVED FOR PUBLIC RELEASE