In Situ Studies of Energy Deposition by Ion Beams.
Final technical rept. 1 Sep 80-31 Aug 83,
CONNECTICUT UNIV STORRS DEPT OF PHYSICS
Pagination or Media Count:
This report summarizes the results of initial surface acoustic wave studies on a variety of systems including lithium niobate LiNbo3, quartz Sio2, silicon on LiNbo3, silicon on Sio2 and silicon on sapphire, which have been subjected to ion implantation and to visible laser irradiation. In addition, results of ion beam mixing studies on the Aluminum-Silicon system are reported, as well as the application of nuclear resonance profiling to a study of the near surface aluminum distribution in silicon. Keywords Ion implantation Ion beam mixing Rutherford backscattering Surface acoustic waves Ion beam damage Laser irradiation of surface acoustic wave system Nuclear resonance profiling. Author
- Solid State Physics