Accession Number:

ADA156354

Title:

Extended Abstracts. Laser Chemical Processing of Semiconductor Devices. Proceedings of Symposium B 1984 Fall meeting of the Materials Research Society Held on 27-29 November 1984 at Boston, Massachusetts,

Descriptive Note:

Final rept. 1 Nov-31 Dec 84,

Corporate Author:

MATERIALS RESEARCH SOCIETY UNIVERSITY PARK PA

Report Date:

1984-01-01

Pagination or Media Count:

127.0

Abstract:

The conference emphasized the following areas Fundamental mechanisms, laser-assisted growth of semiconductor films, process diagnostics, metallization from thin films and gases, photochemical etching, fundamental processes, and dielectric photoformation. Keywords Semiconductor devices Laser diagnostics Lasers Metallization Photochemical Etching Dielectric Photoformation. Author

Subject Categories:

  • Electrical and Electronic Equipment
  • Lasers and Masers
  • Manufacturing and Industrial Engineering and Control of Production Systems

Distribution Statement:

APPROVED FOR PUBLIC RELEASE