Accession Number:

ADA151803

Title:

Fabrication of a Biologically-Implantable, Multiplexed, Multielectrode Array of JFETS for Cortical Implantation.

Descriptive Note:

Master's thesis,

Corporate Author:

AIR FORCE INST OF TECH WRIGHT-PATTERSON AFB OH SCHOOL OF ENGINEERING

Personal Author(s):

• Sopko,M. E.

Report Date:

1984-12-01

Pagination or Media Count:

163.0

Abstract:

A new JFET multielectrode array, comprised of a 16 by 16 array of 256 junction field effect transistors, has been fabricated for use a cortical implant. Changes in the fabrication procedure include The use of a new chrome, six layer mask set, in lieu of emulsion masks different diffusion times and temperatures implementation of HC1 gettering and backside gettering techniques and a revised processing schedule incorporating different wafer cleaning procedures. The primary emphasis of this thesis was on the development of a viable processing schedule for fabrication of the array. Secondary emphasis was placed upon interfacing the array to an NMOS multiplexer and a proposed method of mounting the device in a cortically implantable package. Originator-Supplied Keywords JFET NMOS Multiplexed, and Multielectrode Array.

Descriptors:

• *ARRAYS
• *FIELD EFFECT TRANSISTORS
• *ELECTRODES
• *IMPLANTATION
• *JUNCTION TRANSISTORS
• *CEREBRAL CORTEX
• INTERFACES
• THESES
• FABRICATION
• METAL OXIDE SEMICONDUCTORS
• WAFERS
• CLEANING
• MULTIPLEXING
• MASKS
• GETTERING

Subject Categories:

• Medical Facilities, Equipment and Supplies
• Electrical and Electronic Equipment

Distribution Statement:

APPROVED FOR PUBLIC RELEASE