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Fabrication of a Biologically-Implantable, Multiplexed, Multielectrode Array of JFETS for Cortical Implantation.
AIR FORCE INST OF TECH WRIGHT-PATTERSON AFB OH SCHOOL OF ENGINEERING
Pagination or Media Count:
A new JFET multielectrode array, comprised of a 16 by 16 array of 256 junction field effect transistors, has been fabricated for use a cortical implant. Changes in the fabrication procedure include The use of a new chrome, six layer mask set, in lieu of emulsion masks different diffusion times and temperatures implementation of HC1 gettering and backside gettering techniques and a revised processing schedule incorporating different wafer cleaning procedures. The primary emphasis of this thesis was on the development of a viable processing schedule for fabrication of the array. Secondary emphasis was placed upon interfacing the array to an NMOS multiplexer and a proposed method of mounting the device in a cortically implantable package. Originator-Supplied Keywords JFET NMOS Multiplexed, and Multielectrode Array.
APPROVED FOR PUBLIC RELEASE