Accession Number:

ADA149381

Title:

Laser Assisted Semiconductor Device Processing

Descriptive Note:

Semi-annual technical rept. 31 Jan-30 Jun 1979

Corporate Author:

TRW DEFENSE SYSTEMS GROUP REDONDO BEACH CA

Personal Author(s):

Report Date:

1979-11-06

Pagination or Media Count:

110.0

Abstract:

Contents TASK 1-Laser Induced Surface Processing TASK 2-Laser Blow- off Ion Implantation APPENDIX A-The Effect of Carrier Diffusion on Laser- Heating of Lightly Damaged Semiconductors and APPENDIX B-Laser Annealing of Low Fluence Ion Implanted Silicon.

Subject Categories:

  • Electrical and Electronic Equipment
  • Lasers and Masers
  • Numerical Mathematics

Distribution Statement:

APPROVED FOR PUBLIC RELEASE