Laser Assisted Semiconductor Device Processing
Semi-annual technical rept. 31 Jan-30 Jun 1979
TRW DEFENSE SYSTEMS GROUP REDONDO BEACH CA
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Contents TASK 1-Laser Induced Surface Processing TASK 2-Laser Blow- off Ion Implantation APPENDIX A-The Effect of Carrier Diffusion on Laser- Heating of Lightly Damaged Semiconductors and APPENDIX B-Laser Annealing of Low Fluence Ion Implanted Silicon.
- Electrical and Electronic Equipment
- Lasers and Masers
- Numerical Mathematics