Acoustic Microscopy for Nondestructive Evaluation of Materials
Semi-annual technical rept. 1 Aug 1978-31 Jan 1979
STANFORD UNIV CA EDWARD L GINZTON LAB OF PHYSICS
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The progress in the program for acoustic microscopy is described for the preceding six month interval. The acoustic microscope working at 2.5 GHz has been used to study a variety of materials and a number of integrated circuits. We are beginning to see interesting features in these micrographs - features which are not evident in the optical images. Some of the effort has been spent on improving the instrument so as to extract particular and specified information of a given object. This is being done in part with the aid of a dedicated microprocessor. Originator-supplied key words include Imaging Nondestructive evaluation Silicon and Image enhancement.
- Test Facilities, Equipment and Methods