Accession Number:

ADA148388

Title:

Materials Research Society Symposia Proceedings. Volume 23. Energy Beam-Solid Interactions and Transient Thermal Processing Held at Boston, Massachusetts on 14-17 November 1983,

Descriptive Note:

Corporate Author:

MATERIALS RESEARCH SOCIETY UNIVERSITY PARK PA

Personal Author(s):

Report Date:

1984-01-01

Pagination or Media Count:

802.0

Abstract:

Major Topics include SOISilicon On Insulators Technologies for Integrated Circuits Fundamentals of Energy Beam Interactions with Solids Applications of Energy Beams in Material and Device Processing Device Applications of Rapid Thermal Processing Fundamental Mechanisms Transient Thermal Processing of Silicon Defect Mechanisms and Crystallization of Semiconductor on Insulators SOI Materials and Devices Compound Semiconductors and Metallic Alloys.

Subject Categories:

  • Electrical and Electronic Equipment
  • Fabrication Metallurgy
  • Crystallography
  • Solid State Physics

Distribution Statement:

APPROVED FOR PUBLIC RELEASE