Accession Number:

ADA143664

Title:

Monolithic SAW Oscillators on Silicon.

Descriptive Note:

Final rept. 15 Sep 82-14 Sep 83,

Corporate Author:

ROCKWELL INTERNATIONAL THOUSAND OAKS CA MICROELECTRONICS RESEARCH AND DEVELOPMENT CENTER

Personal Author(s):

Report Date:

1984-04-01

Pagination or Media Count:

50.0

Abstract:

In this report progress in development of a monolithic SAW silicon resonator is described. Specific studies and results in the areas of piezoelectric films for generation and detection of SAW are presented. A multi-mode SAW resonator using thin film Zn0 on silicon was designed, fabricated and characterized. Methods were developed for a new technique of fabricating silicon SAW resonator cavity using orientational etching. It was concluded that this type of etching results in well-defined sidewall structures for reflector cavity element, producing a superior resonant performance with lower phase noise than conventional SAW resonators. Automated measurement equipment was employed to evaluate devices and confirm equivalent circuit models. Device performance very closely matched original circuit models showing excellent confirmation of design parameters. Author

Subject Categories:

  • Line, Surface and Bulk Acoustic Wave Devices

Distribution Statement:

APPROVED FOR PUBLIC RELEASE