Accession Number:

ADA141998

Title:

Computer Simulation Studies of Sputtering and Multimer Formation from Clean and Oxygen Reacted Surfaces of Titanium, Vanadium and Niobium.

Descriptive Note:

Master's thesis,

Corporate Author:

NAVAL POSTGRADUATE SCHOOL MONTEREY CA

Personal Author(s):

Report Date:

1983-12-01

Pagination or Media Count:

221.0

Abstract:

The NPS computer simulation model was used to investigate the sputtering by 1.0 keV argon bombardment of celan and oxygen reacted monocrystalline titanium, vanadium and niobium. Variations in yield, energy and angular distributions and in particular, multimer formation, were studied as a function of oxygen density and location. Simulation results show a significant decline in substrate yield as the oxygen coverage is increased, regardless of location. Further, there is a marked preference for multimer formation by lattice fragmentation, rather than by recombination, for all three metals. The percentages of multimers formed by fragmentation were found to increase with increasing oxygen density for all three metals. Previous results on face-centered cubic crystals concerning the yield per layer and the effects of channeling were confirmed for body-centered cubic and hexagonal closed-packed crystals. For comparison, simulation runs were repeated at ion energies of 0.5 and 2.0 keV for a titanium with oxygen atoms located in three-fold sites with a C2x2 density. Author

Subject Categories:

  • Physical Chemistry
  • Metallurgy and Metallography
  • Crystallography
  • Solid State Physics

Distribution Statement:

APPROVED FOR PUBLIC RELEASE