Theory of Laser-Induced Surface Chemistry with Applications to Microelectronics and Heterogeneous Catalysis.
ROCHESTER UNIV NY DEPT OF CHEMISTRY
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Theory and experiments are reviewed for how laser radiation can stimulate various component mechanisms which contribute to the complex chemistry involved in heterogeneous catalysis. These mechanisms include the processes of desorption, migration and chemical reactions at a gas-solid interface. Application of laser-induced surface chemistry to microelectronics in circuit deposition, lithography, annealing and final testing of the circuit are discussed. In addition to the review, some new theory is presented.
- Physical Chemistry
- Lasers and Masers