Accession Number:

ADA141644

Title:

Organometallic Vapor Phase Epitaxial Growth of High Purity GaInAs Using Trimethylindium,

Descriptive Note:

Corporate Author:

UTAH UNIV SALT LAKE CITY

Personal Author(s):

• Kuo, C. P.
• Yuan, J. S.
• Cohen, R. M.
• Dunn, J.
• Stringfellow, G. B.

Report Date:

1984-03-01

Pagination or Media Count:

5.0

Abstract:

Descriptors:

• *EPITAXIAL GROWTH
• *ORGANOMETALLIC COMPOUNDS
• *SEMICONDUCTORS
• *VAPOR DEPOSITION
• GALLIUM ARSENIDES
• INDIUM COMPOUNDS
• PURITY
• REPRINTS

Subject Categories:

• Solid State Physics

Distribution Statement:

APPROVED FOR PUBLIC RELEASE