Accession Number:

ADA141640

Title:

Reduction of Silicon-Aluminum Interdiffusion by Improved Semiconductor Surface Ordering,

Descriptive Note:

Corporate Author:

XEROX WEBSTER RESEARCH CENTER NY

Personal Author(s):

• Brillson, L. J.
• Slade, M. L.
• Katnani, A. D.
• Kelly, M.
• Margaritondo, G.

Report Date:

1984-01-01

Pagination or Media Count:

3.0

Abstract:

Descriptors:

• *ALUMINUM
• *DIFFUSION
• *ORDER DISORDER TRANSFORMATIONS
• *SEMICONDUCTORS
• *SILICON
• *SURFACES
• ANNEALING
• INTERFACES
• REPRINTS
• SINGLE CRYSTALS
• ULTRAHIGH VACUUM
• WIDTH

Subject Categories:

• Solid State Physics

Distribution Statement:

APPROVED FOR PUBLIC RELEASE