Research in VLSI Systems.
Technical progress rept.
STANFORD UNIV CA
Pagination or Media Count:
The parametric test facility provides two essential support functions for the Fast Turn-Around Laboratory - feedback of process-control information to the fabrication line, and characterization of active devices and parasitics for circuit design. The basic parametric tester, consisting of a Rucker and Kolls model 1032 stepping wafer prober, an HP 4145 semiconductor parameter analyzer, and an HP 6942A switching matrix controlled by an HP 9845 calculator, has been upgraded by addition of an HP 3456 system, DVM, an HP 5316 frequency counter, and an HP 4271 capacitance bridge. The DVM gives increased system flexibility while the frequency coutner provides for the direct measurement of ring oscillator performance. Custom hardware has been designed and built for the rapid extraction of MOS transistor threshold and capacitor breakdown voltages. The system includes the necessary software to measure such process control parameters as line widths, sheet resistances, and threshold and breakdown voltages. Software has also been developed for the statistical analysis of these data on the HP 9845 computer. This software can produce maps of parameter variations across a wafer as well as the usual means, standard deviations, and histograms. Author
- Electrical and Electronic Equipment