Accession Number:

ADA136478

Title:

An Analysis of Thickness-Extensional Trapped Energy Resonant Device Structures with Rectangular Electrodes in the Piezoelectric Thin Film on Silicon Configuration,

Descriptive Note:

Corporate Author:

RENSSELAER POLYTECHNIC INST TROY NY DEPT OF MECHANICAL ENGINEERING AERONAUTICAL ENGINEERING AND MECHANICS

Personal Author(s):

Report Date:

1983-10-01

Pagination or Media Count:

19.0

Abstract:

Subject Categories:

  • Electrical and Electronic Equipment

Distribution Statement:

APPROVED FOR PUBLIC RELEASE