Accession Number:

ADA136433

Title:

Theoretical Study of Laser-Stimulated Chemical Vapor Deposition Processes of Importance in Microelectronics.

Descriptive Note:

Final rept. 1 Oct 82-31 Dec 83,

Corporate Author:

ROCHESTER UNIV NY

Personal Author(s):

Report Date:

1983-12-01

Pagination or Media Count:

36.0

Abstract:

Recent experiments have demonstrated that laser radiation incident on a gas surface interface can stimulate and control the process of vapor deposition onto the surface. This research project has been a theoretical analysis of the deposition and related laser-stimulated processes, with special attention given to the microscopic dynamics of energy flow associated with such processes. Author

Subject Categories:

  • Radiation and Nuclear Chemistry
  • Electrical and Electronic Equipment
  • Lasers and Masers

Distribution Statement:

APPROVED FOR PUBLIC RELEASE