Theoretical Study of Laser-Stimulated Chemical Vapor Deposition Processes of Importance in Microelectronics.
Final rept. 1 Oct 82-31 Dec 83,
ROCHESTER UNIV NY
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Recent experiments have demonstrated that laser radiation incident on a gas surface interface can stimulate and control the process of vapor deposition onto the surface. This research project has been a theoretical analysis of the deposition and related laser-stimulated processes, with special attention given to the microscopic dynamics of energy flow associated with such processes. Author
- Radiation and Nuclear Chemistry
- Electrical and Electronic Equipment
- Lasers and Masers