Accession Number:

ADA134195

Title:

Quantitative Secondary Ion Mass Spectroscopy.

Descriptive Note:

Corporate Author:

GEO-CENTERS INC NEWTON UPPER FALLS MA

Personal Author(s):

Report Date:

1983-07-01

Pagination or Media Count:

40.0

Abstract:

This report describes in detail the use of the Cameca IMS-300 ion microscope for both quantitative analysis of sophisticated electronic devices and qualitative evaluation of ion implanted metals. The use of Secondary Ion Mass Spectroscopy SIMS in depth profiling adds a new dimension to surface analysis, enabling small concentrations of species which were previously undetectable to be determined. By being able to distinguish the differences in mass, isotopic techniques permit the elucidation of mechanisms which are responsible for the formation of wear resistant, low friction surfaces associated with titanium implantation into steels.

Subject Categories:

  • Electrical and Electronic Equipment
  • Atomic and Molecular Physics and Spectroscopy
  • Solid State Physics

Distribution Statement:

APPROVED FOR PUBLIC RELEASE