Study Ion-Solid Interactions and Material Characterization with a New High-Resolution Scanning Ion Probe.
Final rept. 1 Jun 82-31 May 83,
CHICAGO UNIV IL
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The program is a collaboration between the University of Chicago and Hughes Research Labs. The major goal is to produce two 60 KeV high resolution 10-100 A, high current density 1 Asq cm ion microscopes microprobes. The project is partly funded by the NSF. During the first year of the program, the basic optical and overall engineering design of the two ion microprobes was consolidated, with the procurement and contraction phase being completed near the end of the second year.
- Physical Chemistry