Research and Development of Subsurface Acoustic Wave Device Configurations for Sensor Applications.
Final rept. 15 Jul 82-12 Sep 83,
UNITED TECHNOLOGIES CORP HARTFORD CT
Pagination or Media Count:
Subsurface acoustic wave modes that are sensitive to substrate strain but insensitive to temperature and surface fluid loading were sought for sensor applications. The properties of Stoneley-like interface waves in the layered structure SiO2LiNbO3 were examined. A horizontal-shear surface wave in the same material configuration was found to be insensitive to surface fluids and was further studied for sensor applications. Zero first order temperature coefficients were found for these modes by varying the SiO2 film thickness. Surface skimming bulk waves in quartz were also examined and found to possess the most attractive properties for continued work in acoustic wave sensor development. Author
- Line, Surface and Bulk Acoustic Wave Devices
- Acoustic Detection and Detectors