Data Verification Programs for the RSRE E-Beam Data Format,
ROYAL SIGNALS AND RADAR ESTABLISHMENT MALVERN (ENGLAND)
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A number of Fortran programs designed to verify data produced for the RSRE Electron Beam Lithography Machine EBLM-1 are described. Data files intended for exposure by EBLM-1 can be input to any of the programs depending on the level of verification required. Output is hard copy on a Servogor 281 Digital plotter or visual on a DEC VT125 graphics terminal. The programs provide an invaluable means of checking complex data structures before committing valuable machine time and materials.
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