Laser Produced X-Rays for High Resolution Lithography.
Interim rept. 15 Dec 81-1 Jan 83,
BATTELLE COLUMBUS LABS OH
Pagination or Media Count:
The laser-plasma interaction is characterized to gain an understanding of the spectrum of x-rays emitted by the plasma. The potential use of the radiated x-ray for lithography is explored.
- Lasers and Masers
- Printing and Graphic Arts
- Plasma Physics and Magnetohydrodynamics