Accession Number:

ADA126889

Title:

Laser Produced X-Rays for High Resolution Lithography.

Descriptive Note:

Interim rept. 15 Dec 81-1 Jan 83,

Corporate Author:

BATTELLE COLUMBUS LABS OH

Personal Author(s):

Report Date:

1983-01-13

Pagination or Media Count:

39.0

Abstract:

The laser-plasma interaction is characterized to gain an understanding of the spectrum of x-rays emitted by the plasma. The potential use of the radiated x-ray for lithography is explored.

Subject Categories:

  • Lasers and Masers
  • Printing and Graphic Arts
  • Plasma Physics and Magnetohydrodynamics

Distribution Statement:

APPROVED FOR PUBLIC RELEASE