Selectively Thermalized Sputtering for the Direct Synthesis of Sm-Co and Sm-Fe Ferromagnetic Phases.
Final technical rept. 13 Oct 80-12 Oct 82,
QUEENS COLL FLUSHING N Y
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Ferromagnetic films of the Sm-Co and Sm-Fe systems have been synthesized by sputtering onto substrates at temperature above 600 C so that the deposit is directly crystallized upon deposition. For the directly synthesized phases, high sputtering gas pressures were used so that the sputtered atoms transferred excess momentum to the sputtering gas atoms before arriving at the substrates. The objective has been to promote the growth of possible metastable phases and to allow preferred orientation effects to be present in the films. Directly synthesized Sm-Co 15 films grown by these methods have been observed to be highly textured with the 200 orientation dominant for low oxygen levels and then switching to a 110 texture for oxygen levels greater than 5 atomic . The c-axis of the 1-5 phase is rigidly aligned into the film plane. The oxygen to film texture correction exists for substrate temperatures from T 585 to 600 C. Samples of the Sm-Co 15 compound have been directly crystallized by sputtering onto heated substrates with and without an applied inplane field of 1.75 kOe during the sputter deposition.
- Inorganic Chemistry
- Electricity and Magnetism