Numerical Methods for 2-Dimensional Modelling
Final rept. 1 Jul 1980-30 Sep 1982
ROCKWELL INTERNATIONAL CORP THOUSAND OAKS CA SCIENCE CENTER
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This document constitutes the final report on research in efficient numerical methods for two-dimensional VLSI process modeling. The major output of this work is embodied in the computer code MEMBRE for Multidimensional Efficient Moving Boundary Redistribution and the associated users manual. This code predicts the two-dimensional dopant profiles which evolve during oxidation and drive-in, including those effects arising from formation of the birds beak oxide profile and from concentration dependence of the diffusivity at high doping levels. Typical CPU Central processing unit times for a complete redistribution process, involving several thermal cycles, are found to range from two to ten minutes on the IBM 3033. In the final phase of the contract, modifications have been introduced in the basic code to increase the speed of solution for the more difficult cases e.g., arsenic drive-in. A factor of two reduction in CPU time was to be achievable without deterioration in solution accuracy through the use of nonuniform spatial grids. MEMBRE has been made available on tape to the U.S. integrated circuits community in the form of a FORTRAN program executable on the IBM 3033. It contains the basic inputoutput routines from Standards one-dimensional process code SUPREM, modified to deal with two-dimensional process data. Its capabilities have been described in presentations at two technical meetings and in article to appear in the new journal COMPEL. Eight requests for the code from integrated circuit manufacturers and researchers in the U.S. have been processed to date.
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