Automation of Pre-Cap Visual Inspection for Integrated Circuits
Final rept. 1981-1982
ARMY ARMAMENT RESEARCH DEVELOPMENT AND ENGINEERING CENTER PICATINNY ARSENAL NJ PRODUCT ASSURANCE DIRECTORATE
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The feasibility of an automatic inspection system which can perform a 100 internal visual inspection of integrated circuits ICs during production was investigated. Columbia Research Corporation CRC reviewed technical approaches and the feasibility of applying them to production. They also surveyed the companies currently developing automated IC inspection systems and found that no commercial contractor has installed equipment for routine inspection on a production basis. This project was terminated because the necessary equipment is still undergoing design and evaluation.
- Test Facilities, Equipment and Methods