Optimization Study of 256-Element IR-CCD.
Final technical rept. 5 Sep 77-14 Sep 79,
RCA LABS PRINCETON NJ
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A 256-element platinum silicide Schottky-barrier IR-CCD line sensor, developed under a prior contract, was fabricated to a matrix of processing variations and mask modification in an effort to improve the performance of the device. A new device, tC1258, resulted from the optimization study. This report details the wafer fabrication and packaging by wafer lot of all devices processed as an aid to the sponsor in evaluating the arrays. Author
- Infrared Detection and Detectors
- Solid State Physics