Accession Number:

ADA110431

Title:

Numerical Methods for 2-Dimensional Process Modeling

Descriptive Note:

Semi-annual technical rept. no. 3, 1 Jul-31 Dec 1981

Corporate Author:

ROCKWELL INTERNATIONAL CORP THOUSAND OAKS CA SCIENCE CENTER

Report Date:

1982-01-01

Pagination or Media Count:

82.0

Abstract:

Detailed documentation for a users version of the 2-D process modeling code developed under the present contract has been completed, and is provided as an appendix to this report. This code, which has been named MEMBRE for Multidimensional Efficient Moving Boundary Redistribution, will follow a single dopant type through multiple process cycles typical of MOSFET fabrication, including nonuniform growth of a field oxide. Input of data is made in the SUPREM format, utilizing as far as possible, subroutines from SUPREM. Simulation of dopant redistribution during a complete fabrication schedule typically requires a few minutes of CPU time on the IBM 3033 or 370168. A CDC version of the code runs approximately two-and-one-half times faster on the Cyber 176.

Subject Categories:

  • Electrical and Electronic Equipment
  • Theoretical Mathematics

Distribution Statement:

APPROVED FOR PUBLIC RELEASE