Development of Thin Conducting Film Fabrication Methods.
UNION CARBIDE CORP OAK RIDGE TN Y-12 PLANT
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Fabrication of seamless cylindrical pyrolitic carbon foils with 5 cm radius, 2 cm height, and thickness as low as 10 micro gsq cm was investigated. Chemical vapor deposition at 1050 C, flowing 1 part methane in 25 parts Argon at 4 lmin through a 5 in diameter, 12 in tall graphite susceptor containing a stack of 5 cm radius, 2 in tall fused silica cylinders for 1 to 2 hours resulted in reproducible formation of pyrolitic carbon films weakly bonded to the inner surface of the fused silica cylinders. The carbon films ranged from 20 to 100 micro g sq cm, depending on deposition time. It proved possible to transfer the carbon foils intact from the formation mandrel fused silica to various intermediate mandrels beeswax, polymeric resins such as PVA, PVC, PBS, Saran. Efforts to transfer the foils intact from formation on intermediate mandrels to electrode rings to obtain free standing foils were not successful for masses below 600 micro gsq cm. However, polymeric resin cylinders 600 micro gsq cm were readily made. Author
- Metallurgy and Metallography