Monolithic ZnO SAW Structures.
Interim scientific rept. 1 May 80-30 Apr 81,
PURDUE UNIV LAFAYETTE IN SCHOOL OF ELECTRICAL ENGINEERING
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A range of ZnO-on-Silicon surface acoustic wave devices have been fabricated and tested. Both diode and magnetion rf sputtering was employed. A new transducer for the monolithic configuration was reported which permits increased operating frequencies. The first SAW resonator on silicon was constructed and operated. Both high Q and excellent temperature stability was observed. Author
- Solid State Physics