Accession Number:

ADA101078

Title:

Monolithic ZnO SAW Structures.

Descriptive Note:

Interim scientific rept. 1 May 80-30 Apr 81,

Corporate Author:

PURDUE UNIV LAFAYETTE IN SCHOOL OF ELECTRICAL ENGINEERING

Personal Author(s):

Report Date:

1981-06-01

Pagination or Media Count:

30.0

Abstract:

A range of ZnO-on-Silicon surface acoustic wave devices have been fabricated and tested. Both diode and magnetion rf sputtering was employed. A new transducer for the monolithic configuration was reported which permits increased operating frequencies. The first SAW resonator on silicon was constructed and operated. Both high Q and excellent temperature stability was observed. Author

Subject Categories:

  • Solid State Physics

Distribution Statement:

APPROVED FOR PUBLIC RELEASE