Accession Number:

ADA099456

Title:

Photoelectrochemical Depositions of Microscopic Metal Film Patterns on Si and GaAs.

Descriptive Note:

Technical rept.,

Corporate Author:

EIC LABS INC NEWTON MA

Report Date:

1981-05-01

Pagination or Media Count:

18.0

Abstract:

Microscopic metal film patterns have been imaged on p-Si and n- and p-GaAs by photoelectrochemical deposition from standard aqueous plating solutions. The photodeposition of Cu, Ni, Pd and Au films was investigated. Resolution exceeding 10 micrometers has been achieved for deposits on Au on p-GaAs and Cu on p-Si. Author

Subject Categories:

  • Metallurgy and Metallography
  • Fabrication Metallurgy
  • Solid State Physics

Distribution Statement:

APPROVED FOR PUBLIC RELEASE