Accession Number:

ADA093843

Title:

Numerical Methods for 2-Dimensional Modeling

Descriptive Note:

Semi-annual technical rept. 1 Jul-31 Dec 1980

Corporate Author:

ROCKWELL INTERNATIONAL CORP THOUSAND OAKS CA SCIENCE CENTER

Personal Author(s):

Report Date:

1980-12-01

Pagination or Media Count:

41.0

Abstract:

Progress toward the development of a fast algorithm for two- dimensional computational modeling of VLSI fabrication processes is described. The first report of an algorithm producing two-dimensional dopant profiles in seconds per process step is presented. A summary of investigations to date and plans for future work are discussed.

Subject Categories:

  • Electrical and Electronic Equipment
  • Theoretical Mathematics

Distribution Statement:

APPROVED FOR PUBLIC RELEASE