Accession Number:

ADA091854

Title:

Manufacturing Methods and Technology Program Automatic In-Process Microcircuit Evaluation.

Descriptive Note:

Final rept. 22 Sep 77-15 Aug 80,

Corporate Author:

RCA AUTOMATED SYSTEMS DIV BURLINGTON MA

Personal Author(s):

Report Date:

1980-10-01

Pagination or Media Count:

175.0

Abstract:

This final report summarizes all the work performed under the subject contract. The method of approach to the program included system analyses to investigate techniques for hybrid image extraction, determination of illumination requirements and techniques, and determination of Return Beam Vidicon operating modes for the demonstration model. An AIME demonstration model and system software were designed, built, integrated and tested. Technical and physical descriptions of the demonstration model equipmentsoftware design and configuration are provided. Analysis was made of typical characteristics of hybrid thick-film substrate conductor faults resulting from printing, probing and work-in-process handling. Based on this analysis test sample substrates containing designed-in-faults were designed, fabricated and used to evaluate AIME demonstration model operation. Data resulting from AIME operation, utilizing the test sample substrates, demonstrated automatic detection of 96.4 percent of all substrate defects. When defects were classified by size, AIME successfully detected 100 percent of defects three 3 mils or larger, and 81 percent of defects less than three 3 mils. Evaluation was also made of semi-automatic mode of operation for pre-cap hybrid visual inspection. Recommendations for further system development are included. Author

Subject Categories:

  • Electrical and Electronic Equipment
  • Test Facilities, Equipment and Methods

Distribution Statement:

APPROVED FOR PUBLIC RELEASE