Interactions of Molecular Ion Beams with Surfaces.
Rept. no. 1 (Final) 1 Jul 79-30 Jun 80,
HOUSTON UNIV TX DEPT OF CHEMISTRY
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Reactions of positive N2 ion beams with the surface of polycrystalline rhenium foil over the range 150-3000 eV have been studied by the techniques of X-ray photoelectron spectroscopy XPS and thermal desorption spectrometry TDS. The reactions produce a nitride layer of the type ReNx, 0.21 less than or equal to X less than or equal to 0.40, with x varying as a function of ion kinetic energy and depth into the surface. The nitride layer extends from the surface down to the penetration depth of the atoms, which varies from approx. 15 angstroms at 0.3 keV to approx. 76 angstoms at 2.5 keV ion energy. The product nitride and chemisorbed nitrogen on Re are distinctly different, exhibiting N1s binding energies of 397.9 and 396.8 eV, respectively, and TDS maxima near 425 and 600 C, respectively.
- Particle Accelerators