Accession Number:

ADA073813

Title:

Growth and Characterization of Epitaxial Piezoelectric and Semiconductor Films.

Descriptive Note:

Final rept. 1 Mar 77-31 May 79,

Corporate Author:

UNIVERSITY OF SOUTHERN CALIFORNIA LOS ANGELES ELECTRONIC SCIENCES LAB

Personal Author(s):

Report Date:

1979-07-01

Pagination or Media Count:

40.0

Abstract:

This report includes the details of research work on this two-year project on the growth and characterization of thin films for piezoelectric applications. The report covers the results on A1N and ZnO growth by the metal-organic process. The problems associated with the A1N on sapphire system have been discussed. In the case of ZnO films, low temperature CVD system DEZH2O and DEZCO2 have been developed. It is seen that the films grown by the DEZCO2 system do not need any post-growth diffusion, as the as-grown resistivity is quite high. Author

Subject Categories:

  • Inorganic Chemistry
  • Metallurgy and Metallography
  • Crystallography

Distribution Statement:

APPROVED FOR PUBLIC RELEASE