Accession Number:

ADA071942

Title:

Acoustic Wave Measurements of Semiconductor Parameters.

Descriptive Note:

Invited paper,

Corporate Author:

STANFORD UNIV CALIF EDWARD L GINZTON LAB

Personal Author(s):

Report Date:

1977-06-01

Pagination or Media Count:

32.0

Abstract:

Various types of acoustic surface wave techniques for measuring the parameters ofa semiconductor are discussed in this paper. These include techniques to measure mobility, carrier density, surface state density, and trapping time in surface states. Author

Subject Categories:

  • Acoustics
  • Solid State Physics

Distribution Statement:

APPROVED FOR PUBLIC RELEASE