Accession Number:

ADA070320

Title:

Paramagnetic Defects in the Surface Region of Processed Silicon,

Descriptive Note:

Corporate Author:

ARMY ELECTRONICS TECHNOLOGY AND DEVICES LAB FORT MONMOUTH NJ

Personal Author(s):

• Caplan, Philip J.

Report Date:

1976-01-01

Pagination or Media Count:

9.0

Abstract:

Descriptors:

• *MAGNETIC RESONANCE
• *METAL OXIDE SEMICONDUCTORS
• *SILICON
• *SILICON DIOXIDE
• *SURFACE ANALYSIS
• DAMAGE
• ELECTRON SPIN RESONANCE
• IMPURITIES
• NUCLEAR MAGNETIC RESONANCE
• REPRINTS
• SURFACES

Subject Categories:

• Solid State Physics

Distribution Statement:

APPROVED FOR PUBLIC RELEASE