Accession Number:

ADA067367

Title:

Fabrication of Microbridge Josephson Junctions Using Electron Beam Lithography.

Descriptive Note:

Technical rept. 1 Feb 78-31 Jan 79,

Corporate Author:

STATE UNIV OF NEW YORK AT STONY BROOK DEPT OF PHYSICS

Personal Author(s):

• Lukens,J. E.
• Sandell,R. D.
• Varmazis,C.

Report Date:

1978-11-14

Pagination or Media Count:

15.0

Abstract:

Descriptors:

• *LITHOGRAPHY
• *MICROCIRCUITS
• FABRICATION
• ELECTRON BEAMS
• JOSEPHSON JUNCTIONS
• MICROWAVE BRIDGES

Subject Categories:

• Electrical and Electronic Equipment
• Printing and Graphic Arts

Distribution Statement:

APPROVED FOR PUBLIC RELEASE