Accession Number:

ADA066918

Title:

Study of Electronic Transport and Breakdown in Thin Insulating Films

Descriptive Note:

Semi-annual technical rept. no. 5

Corporate Author:

PRINCETON UNIV NJ DEPT OF ELECTRICAL ENGINEERING AND COMPUTER SCIENCE

Personal Author(s):

Report Date:

1978-06-01

Pagination or Media Count:

82.0

Abstract:

Recent progress is reported in an ongoing program of studies of high- field effects in thin insulating films on semiconducting substrates. The investigations reported here include further studies of the high-field generation of interface states and electron traps in the Si-Si02 system, a preliminary investigation of silicon dioxide grown at high pressure, and studies of CVD silicon nitride and aluminum oxide under high-field conditions. Author

Subject Categories:

  • Electricity and Magnetism
  • Solid State Physics

Distribution Statement:

APPROVED FOR PUBLIC RELEASE