Acoustically Scanned Optical Imaging Devices
Semiannual rept. no. 7, 1 Jul-31 Dec 1978
STANFORD UNIV CA EDWARD L GINZTON LAB OF PHYSICS
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Our ZnO rf sputtering system has been tested more thoroughly in the last three months. We have succeeded in making high quality reproducible volume wave transducers with as good as and in some cases better characteristics than any we have made before. Deposition rates are a factor of six higher than in our previous system and a factor of two higher than the Japanese work. We believe, from our experience, that the deposition rate can be made still higher while at the same time obtaining better quality films. Experiments have been carried out depositiong ZnO on gold, on SiO2, on Si, and on quartz. All the layers look to be good quality. We have just begun to construct surface wave devices made with this technique. We anticipate that the results will be excellent and reproducible.
- Electrical and Electronic Equipment