Investigation of InP Technology.
Interim rept. 1 Aug 77-1 Aug 78,
VARIAN ASSOCIATES INC PALO ALTO CA
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Undoubtedly InP is becoming a very important semiconductor, in particular for optoelectronic applications. Although InP-based device results are appearing with increased frequency in both microwave and optoelectronic areas, substrate growth and characterization have been limited to a few government contract reports. This program is aimed at the investigation of InP-based technology from polycrystalline synthesis to epitaxial growth. Of primary consideration is the development of technology for reliably synthesizing polycrystalline InP from the elements. Even though the growth of single-crystal InP is well developed, based on the commercial equipment for LEC-growth of GaAs and GaP, very little information is available on the synthesis of InP from the elements.
- Solid State Physics