IC Fabrication Using Electron-Beam Technology.
Quarterly rept. no. 8, 1 Jun-1 Sep 78,
TEXAS INSTRUMENTS INC DALLAS
Pagination or Media Count:
All of the required environmental and electrical tests of the first article 256-bit Bipolar RAM devices 50 were completed this quarter. These units passed all of the electrical measurements at 0 C, 25 C, and 70 C. However, the maximum operating speed of the units was about 20 slower than desired due to the electron resist being inadvertently removed during the contact oxide etch step. Fabrication of the pilot production units has begun and these units should pass all specifications including operating speed. Author
- Electrical and Electronic Equipment
- Computer Hardware
- Manufacturing and Industrial Engineering and Control of Production Systems