Photolithographic Techniques for Surface Acoustic Wave (SAW) Devices. Volume 1. Process Specification.
Final rept. 1 Jul 75-31 Dec 78,
HUGHES AIRCRAFT CO FULLERTON CALIF GROUND SYSTEMS GROUP
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The object of the program was the establishment of a production capability for surface acoustic wave devices of varied design and material for the purpose of meeting estimated military needs for a period of two years after the completion of the contract, and to establish a base and plans which may be used to meet expanded requirements. The primary requirement was the pilot line production of devices that are reliable, reproducible, and low cost. The first phase of this program required the design, fabrication and testing of a total of 60 prototype bandpass, tapped delay line and pulse compression SAW filters on both lithium niobate and ST-quartz. The First Engineering PhasePhase I electrical testing demonstrated that the device designs generally met the specifications imposed by the program. Deviations from specification, which required additional test to optimize the levels of padding andor shunt resistance and capacitance, were resolved during the Second Engineering PhasePhase II for the PC-Q, PC-LNand TDL-200. Deviations from the insertion loss specification occurred with the BP-LN and TDL-100 designs. In the former case, a redesign excluding the program-specified mult-strip coupler, was theoretically evaluated. In the latter case, as pointed out in the Hughes proposal, a theoretical analysis precluded the possibility of a specification accommodation.
- Line, Surface and Bulk Acoustic Wave Devices
- Manufacturing and Industrial Engineering and Control of Production Systems