Accession Number:

ADA063240

Title:

Optimization Study of IR-CCD Array.

Descriptive Note:

Final technical rept. 15 Apr 77-11 Mar 78,

Corporate Author:

RCA LABS PRINCETON N J

Report Date:

1978-11-01

Pagination or Media Count:

63.0

Abstract:

The IR-CCD arrays with platinum silicide Schottky-barrier detectors fabricated under this contract contain a 25x50-element area sensor and a 62-element line sensor. The above devices were processed with two-level polysilicon-gate buried-channel CCD registers for image readout. The platinum silicide detectors were made with implanted n-type guard rings. Such construction resulted in sufficiently low detector dark current at 77 K to allow frame-integration times of 30 to 100 ms. The process optimization included high-temperature sintering of the platinum silicide either at 650 deg for 10 minutes or for 30 minutes followed by a 20-minute hydrogen anneal at 550 C. Devices were also made with low-temperature sintering of platinum silicde at 320 C for 8 h in nitrogen followed by another 8 h in forming gas. Author

Subject Categories:

  • Electrical and Electronic Equipment
  • Infrared Detection and Detectors
  • Solid State Physics

Distribution Statement:

APPROVED FOR PUBLIC RELEASE