Accession Number:

ADA059752

Title:

Computer Aided Engineering of Semiconductor Integrated Circuits.

Descriptive Note:

Interim rept. 1 May 77-31 Oct 77,

Corporate Author:

STANFORD UNIV CALIF INTEGRATED CIRCUITS LAB

Report Date:

1978-07-01

Pagination or Media Count:

444.0

Abstract:

Economical procurement of small quantities of high performance custom integrated circuits for military systems is severely impeded by inadequate process, device and circuit models that handicap accurate computer-aided design at low cost. The salient objective of this program is to formulate physical models of fabrication processes, devices and circuits to allow total computer-aided design of custom large-scale integrated circuit subsystems to reduce development cycle time and cost. The basic areas under investigation are 1 ion implantation and diffusion of dopants 2 thermal oxidation 3 chemical vapor deposition of silicon epitaxy and 4 device simulation and statistical circuit modeling. This report discusses the results of the second year of the program. Author

Subject Categories:

  • Electrical and Electronic Equipment
  • Solid State Physics

Distribution Statement:

APPROVED FOR PUBLIC RELEASE