Computer Aided Engineering of Semiconductor Integrated Circuits.
Interim rept. 1 May 77-31 Oct 77,
STANFORD UNIV CALIF INTEGRATED CIRCUITS LAB
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Economical procurement of small quantities of high performance custom integrated circuits for military systems is severely impeded by inadequate process, device and circuit models that handicap accurate computer-aided design at low cost. The salient objective of this program is to formulate physical models of fabrication processes, devices and circuits to allow total computer-aided design of custom large-scale integrated circuit subsystems to reduce development cycle time and cost. The basic areas under investigation are 1 ion implantation and diffusion of dopants 2 thermal oxidation 3 chemical vapor deposition of silicon epitaxy and 4 device simulation and statistical circuit modeling. This report discusses the results of the second year of the program. Author
- Electrical and Electronic Equipment
- Solid State Physics