Accession Number:

ADA058473

Title:

SUPREM II -- A Program for IC Process Modeling and Simulation.

Descriptive Note:

Technical rept.,

Corporate Author:

STANFORD UNIV CALIF STANFORD ELECTRONICS LABS

Report Date:

1978-06-01

Pagination or Media Count:

121.0

Abstract:

SUPREM II is the second version of the IC process simulation program, SUPREM. Several modifications and refinements relative to SUPREM I 1 have been implemented but the basic program architecture and IO philosophy has not been altered. The input language syntax remains the same, but various semantic changes have been made mainly to accommodate the new or improved physical models used in SUPREM II. This report consists of three parts. In the main part the physical process models and their numerical implementation in SUPREM II are described. Also, some details of the program and data structure are discussed. The second part contains the SUPREM II operating manual valid at the time of the program release. The last part of the report consists of a set of examples of program usage in multi-step process simulation together with some of the resulting outputs.

Subject Categories:

  • Computer Programming and Software
  • Computer Hardware

Distribution Statement:

APPROVED FOR PUBLIC RELEASE