Accession Number:

ADA056914

Title:

Computer Aided Engineering of Semiconductor Integrated Circuits

Descriptive Note:

Interim rept. 1 Nov 1976-30 Apr 1977

Corporate Author:

STANFORD UNIV CA INTEGRATED CIRCUITS LAB

Personal Author(s):

• Meindl, J. D.
• Saraswat, K. C.
• Dutton, R. W.
• Gibbons, J. F.
• Plummer, J. D.
• Deal, B. E.
• Kamins, T. I.

Report Date:

1978-04-01

Pagination or Media Count:

91.0

Abstract:

The objectives of this program are to remove the empiricism associated with the design and manufacturing of custom integrated circuits for military applications and to reduce the cost of these circuits by devising improved computer-aided engineering techniques. Efforts of research covered by this report are in the areas of 1 ion implantation and diffusion of dopants, 2 thermal oxidation, 3 chemical vapor deposition of silicon, and 4 device simulation and statistical circuit modeling.

Descriptors:

• *COMPUTER AIDED DESIGN
• *INTEGRATED CIRCUITS
• *SEMICONDUCTOR DEVICES
• CIRCUIT ANALYSIS
• COMPUTERIZED SIMULATION
• DOPING
• ION IMPLANTATION
• MATHEMATICAL MODELS
• OXIDATION
• SEMICONDUCTORS
• SILICON
• SUBSTRATES
• THERMAL DIFFUSION
• VAPOR DEPOSITION

Subject Categories:

• Electrical and Electronic Equipment
• Solid State Physics

Distribution Statement:

APPROVED FOR PUBLIC RELEASE