Accession Number:

ADA055480

Title:

Mechanisms for Amorphous State Formation in Ion Implanted Silicon.

Descriptive Note:

Final rept. 1 Nov 74-30 Apr 78,

Corporate Author:

MISSOURI UNIV-ROLLA

Personal Author(s):

Report Date:

1978-05-01

Pagination or Media Count:

8.0

Abstract:

A summary is given of the results obtained on this grant. Various experiments were performed to better understand the mechanisms which are important to the crystalline to amorphous transformation produced by ion implantation. From these experiments have emerged several important concepts and processes. These have been reported in several publications and talks, and it has been possible to interpret the results in terms of a composite model for the amorphization transformation.

Subject Categories:

  • Solid State Physics

Distribution Statement:

APPROVED FOR PUBLIC RELEASE