Accession Number:

ADA053853

Title:

Development of a Triple-Product Convolver Using Zinc Oxide on Silicon.

Descriptive Note:

Research and development rept. Oct 76-Sep 77,

Corporate Author:

NAVAL OCEAN SYSTEMS CENTER SAN DIEGO CA

Personal Author(s):

Report Date:

1977-09-30

Pagination or Media Count:

42.0

Abstract:

Triple-product convolution has been demonstrated with two modulated 80 MHz carrier signals and a third signal consisting of a set of dc voltages. This operation was performed in realtime with two different surface acoustic wave SAW devices built on silicon substrates. The transduction of SAWs onto silicon is by means of a thin overlying film of zinc oxide, which is deposited by RF sputtering in a partial oxygen atmosphere. Transducer patterns are defined by lift-off photolithography. Good predictions of steady-state device behavoir were made using mathematical models, although observed long term memory effects, probably associated with trapping of charge in the ZnO and the SiSiO2 interface, are not fully understood. Author

Subject Categories:

  • Line, Surface and Bulk Acoustic Wave Devices

Distribution Statement:

APPROVED FOR PUBLIC RELEASE