IC Fabrication Using Electron-Beam Technology.
Quarterly rept. no. 3, 1 Mar-1 Jun 77,
TEXAS INSTRUMENTS INC DALLAS
Pagination or Media Count:
Slice processing and process development on the 256-bit bipolar RAMs has continued this quarter. Four lots of bipolar RAMs are presently in process and the oxidation, epitaxial and diffusion parameters from these lots have been measured. A comparison between the measured parameters and their specified values has been made. The processes from polished substrate through DUF O.R. have been significantly modified to reduce cost and processing steps. Work on improving the alignment marker process is continuing. Author
- Electrical and Electronic Equipment
- Manufacturing and Industrial Engineering and Control of Production Systems
- Particle Accelerators