Accession Number:

ADA052355

Title:

IC Fabrication Using Electron-Beam Technology.

Descriptive Note:

Quarterly rept. no. 3, 1 Mar-1 Jun 77,

Corporate Author:

TEXAS INSTRUMENTS INC DALLAS

Report Date:

1978-01-01

Pagination or Media Count:

35.0

Abstract:

Slice processing and process development on the 256-bit bipolar RAMs has continued this quarter. Four lots of bipolar RAMs are presently in process and the oxidation, epitaxial and diffusion parameters from these lots have been measured. A comparison between the measured parameters and their specified values has been made. The processes from polished substrate through DUF O.R. have been significantly modified to reduce cost and processing steps. Work on improving the alignment marker process is continuing. Author

Subject Categories:

  • Electrical and Electronic Equipment
  • Manufacturing and Industrial Engineering and Control of Production Systems
  • Particle Accelerators

Distribution Statement:

APPROVED FOR PUBLIC RELEASE