Distribution of Flatband Voltages in Laterally Nonuniform Mis Capacitors and Application to a Test for Nonuniformities
Special technical rept.
PRINCETON UNIV NJ DEPT OF ELECTRICAL ENGINEERING AND COMPUTER SCIENCE
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The effect of a laterally nonuniform distribution of fixed charge in the insulator of an MIS capacitor can be characterized by a flatband-voltage distribution function. We present a simple, approximate C-V method for determining this distribution, and apply the result to a test for distinguishing between interface states and laterally nonuniform fixed charge. Examples are presented.
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