Accession Number:

ADA051167

Title:

Distribution of Flatband Voltages in Laterally Nonuniform Mis Capacitors and Application to a Test for Nonuniformities

Descriptive Note:

Special technical rept.

Corporate Author:

PRINCETON UNIV NJ DEPT OF ELECTRICAL ENGINEERING AND COMPUTER SCIENCE

Personal Author(s):

Report Date:

1977-11-01

Pagination or Media Count:

25.0

Abstract:

The effect of a laterally nonuniform distribution of fixed charge in the insulator of an MIS capacitor can be characterized by a flatband-voltage distribution function. We present a simple, approximate C-V method for determining this distribution, and apply the result to a test for distinguishing between interface states and laterally nonuniform fixed charge. Examples are presented.

Subject Categories:

  • Electrical and Electronic Equipment
  • Solid State Physics

Distribution Statement:

APPROVED FOR PUBLIC RELEASE