Preparation of Variable Thickness Microbridges Using Electron Beam Lithography and Ion Etching.
Technical rept. 31 Jul-31 Nov 76,
STATE UNIV OF NEW YORK AT STONY BROOK DEPT OF PHYSICS
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Techniques have been developed for the fabrication of variable thickness constriction VTC microbridges. The bridges produced by these techniques display the superior characteristics found by others in VTC bridges made by scratching techniques. The EBL techniques described have the advantage of being easily applicable to fabrication of large arrays of nearly identical bridges. Author
- Electrical and Electronic Equipment
- Fabrication Metallurgy