Accession Number:

ADA043668

Title:

Preparation of Variable Thickness Microbridges Using Electron Beam Lithography and Ion Etching.

Descriptive Note:

Technical rept. 31 Jul-31 Nov 76,

Corporate Author:

STATE UNIV OF NEW YORK AT STONY BROOK DEPT OF PHYSICS

Personal Author(s):

Report Date:

1977-06-08

Pagination or Media Count:

6.0

Abstract:

Techniques have been developed for the fabrication of variable thickness constriction VTC microbridges. The bridges produced by these techniques display the superior characteristics found by others in VTC bridges made by scratching techniques. The EBL techniques described have the advantage of being easily applicable to fabrication of large arrays of nearly identical bridges. Author

Subject Categories:

  • Electrical and Electronic Equipment
  • Fabrication Metallurgy

Distribution Statement:

APPROVED FOR PUBLIC RELEASE