MNOS BORAM Manufacturing Methods and Technology Project.
Quarterly progress rept. no. 1, 1 Jul-30 Sep 76,
WESTINGHOUSE DEFENSE AND ELECTRONIC SYSTEMS CENTER BALTIMORE MD SYSTEMS DEVELOPMENT DIV
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A manufacturing methods project has been initiated to establish a pilot production line for metal nitride oxide semiconductors MNOS block oriented random access memory BORAM multichip hybrid circuits. The first phase of activity is concerned with definition and establishment of the required production capability. This report describes the chip fabrication sequence, and outlines some experimental investigations. Program status and plans for the next quarter are reviewed. Author
- Electrical and Electronic Equipment
- Manufacturing and Industrial Engineering and Control of Production Systems